BEI Kimco, a brand of Sensata Technologies, has developed new VCAs to meet the high-purity and low out-gassing requirements for semiconductor, military and space applications.
Though vastly different in use, equipment used in these three markets all demand extremely low out-gassing to prevent not only film formation on lens and glass surfaces, but also interference with equipment operation. Ultra-pure requirements are especially important in the semiconductor manufacturing process. Additionally, these devices also require high precision actuators for exact motion control positioning. BEI Kimco’s new actuators incorporate special materials to meet these increasingly stringent low out-gassing requirements.
Key to the VCAs’ specifications that would meet these performance needs while measuring only ½” to 2”in size, BEI Kimco developed Models LA05-05 and LA15-16 actuators that minimize the use of adhesives and inks and incorporate only approved materials. The new design uses primarily mechanical assembly methods within a clean manufacturing process, thereby eliminating substances that could cause outgassing and contamination. High energy Neodymium Iron Boron (NeFeB) magnets were incorporated to provide superior operating efficiencies.
The resulting high performance VCAs measure 12‒38 mm in diameter and 12‒40 mm in length (at mid-stroke). “These two new actuators are the most recent example of BEI Kimco’s commitment to developing new products that meet customer’s application specific requirements,” says Jim McNamara, BEI Kimco Applications Engineer. “For environments that require zero contamination and low out-gassing, the type of material used to build the VCA was extremely important.
In this case, we started with a list of NASA approved materials as the basis for product development and performed testing throughout the process in our own facilities as well as the customer’s.” BEI Kimco’s low out-gassing VCAs are suitable for a wide variety of demanding OEM environmental conditions such as semiconductor, military, aerospace, microelectronics, test and measurement, and industrial manufacturing applications.